| 摘要 |
PURPOSE: A self-aligning measurement head unit for an air gauge is provided to perform an active correction function, thereby improving the efficiency and the accuracy of measurement and increasing lifetime. CONSTITUTION: A self-aligning measurement head unit for an air gauge includes a supporting frame (101), a hollow supporting shaft (111), a head block (130), a first elastic body (120) for absorbing shock, and an air supply pipe (150). Coordinates of the supporting frame can be transferred by an actuator. The supporting shaft is supported by a slide guide (110) installed on the supporting frame to be slid. The head block supports the measurement head. One end portion of the head block is supported by a tip end portion of the supporting shaft and hung on the supporting shaft. The first elastic body is installed between the supporting shaft and the head block. The air supply pipe is penetrated through the supporting shaft and the head block, thereby connecting an air supplying source and an air injecting hole of the measurement head. |
