| 发明名称 |
TRANSFER ROBOT |
| 摘要 |
<p>PURPOSE: A transfer robot is provided to reduce a collision with a surrounding structure by decreasing the impact applied to a hand plate when the hand plate is stopped. CONSTITUTION: A driving source (120) generates rotation driving power. An arm plate reciprocates on a base. A hand plate (140) includes a hand to transfer a substrate. A stopper (150) stops the movement of the hand plate. A power transmitting unit moves the arm plate in the same direction as the hand plate.</p> |
| 申请公布号 |
KR101308988(B1) |
申请公布日期 |
2013.10.02 |
| 申请号 |
KR20120080313 |
申请日期 |
2012.07.24 |
| 申请人 |
SEOJIN ENGINEERING CO., LTD. |
发明人 |
KANG, MYUNG CHUN |
| 分类号 |
H01L21/677;B25J18/02;B65G49/07;G02F1/13 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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