| 摘要 |
A FAIMS ion mobility spectrometer chamber with a high repeatability of dimensions, permitting stable gas flow, mechanical rigidity, excellent thermal conductivity, and high temperature stability of gas flow. The heating resistor, ionizer electrodes, HV detector electrodes and collecting electrodes, and conducting contacts, are applied in the form of layers of precious metals on ceramic plates. The heating resistor is located on the outer surface of the top and bottom ceramic plate in the form of a resistive layer of ruthenium dioxide. On the inner surface of each of the top and bottom ceramic plates, there are gas ionizer electrodes in the form of a layer of radioactive nickel, HV electrodes and collecting electrodes, in the form of layers of gold. The conducting contacts are made of a palladium-silver layer, whereas on the edge surfaces of the ceramic plates there are edge contacts, which are made of silver paste. |
