| 摘要 |
PURPOSE: A liquid processing apparatus, a liquid processing method, and a storage media are provided to protect a liquid processing process by prevent processing liquid from being dropped. CONSTITUTION: A nozzle(40) is arranged at the lower side of a nozzle head(34). The nozzle head is the tip end of an arm(33). A plurality of liquid processing parts is serially arranged to a transversal direction. A nozzle bath is installed to hold the nozzle. A supporting unit is arranged at the upper region of the liquid processing parts and between the nozzle baths. A driving unit moves the supporting unit.
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