| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid crystal display device equipped with copper wiring lines of low resistance that sufficiently secure adhesiveness with a glass substrate or a substrate having a base such as a transparent conductive film or the like mainly comprising indium. SOLUTION: A signal wiring line is formed of a layered film having a first layer 2B as a lower layer and a second layer 2C as an upper layer on a glass substrate 1 or on a transparent conductive film 2A mainly comprising indium formed on the glass substrate 1. The first layer 2B consists of a copper layer having a porous structure and is formed by using a rare gas and oxygen or nitrogen gas. Then there is formed a pure copper layer being the second layer 2C by using only a rare gas. The copper wiring line of low resistance excellent in adhesiveness is formed on the substrate or on the transparent conductive film 2A mainly comprising indium. By using the same target for both of the first layer 2B and the second layer 2C, productivity can be improved. COPYRIGHT: (C)2009,JPO&INPIT
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