METHOD OF MANUFACTURING CHEMICAL MECHANICAL POLISHING LAYERS HAVING A WINDOW

摘要

PURPOSE: A method for manufacturing a chemical-mechanical polishing layer with a window is provided to minimize or remove undesirable density defects, thereby minimizing the surface roughness of the polishing layer. CONSTITUTION: A method for manufacturing a chemical-mechanical polishing layer includes the following steps of: preparing a mold base (2) and a mold (1) having a wall (8) attached to the mold base; preparing a liner (4) having a mean thickness of 2-10 cm, the upper surface (6), and the lower surface (3); providing an adhesive (7) and a window block; providing curable materials including a liquid pre-polymer; providing a nozzle with a nozzle opening; forming a mold cavity with the upper surface and the wall of the liner; joining the window block on the upper surface of the liner with the adhesive; charging the curable materials into the mold cavity via the nozzle opening for a charging period; and slicing a cake into the polishing layers each having an integrated window.