| 摘要 |
PURPOSE: A manufacturing method of an inorganic plate thin film battery is provided to simplify process by not using separate substrates and to obtain reliability and flexibility of a thin film battery. CONSTITUTION: A manufacturing method of an inorganic plate thin film battery(100) comprises: a step of preparing a first electrode current collector(10); a step of evaporating a first electrode(20) on the first electrode current collector; a step of evaporating electrolyte(30) on the first electrode; a step of evaporating a second electrode(40) on the electrolyte; a step of evaporating a second electrode current collector(50) on the second electrode. When evaporating the first electrode, the electrolyte, the second electrode and the second electrode current collector on the first electrode current collector, a roll to roll method is used. |
