发明名称 AIR SHOWER APPARATUS
摘要 PURPOSE: An air shower is provided to improve dust collection efficiency by using a nozzle for down flow and strong wind. CONSTITUTION: A main body(100) has a shower room(110) and a blowing pass(120). An entrance door and an exit door are installed in the main body. A blower(300) and a filter(400) are installed in the blowing pass. Air nozzles(500) are adhered to the shower room. A vent(600) is formed in the lower part of the shower room.
申请公布号 KR101314273(B1) 申请公布日期 2013.10.02
申请号 KR20110128770 申请日期 2011.12.05
申请人 发明人
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址