| 摘要 |
PURPOSE: A nozzle of a resin-spreading apparatus conducts a spread process to a substrate on which the array spacing of semiconductors is different from each other without replacing the whole of nozzles. CONSTITUTION: A nozzle of a resin-spreading apparatus comprises a first member (71) which has a connection hole (711) connected to a resin supply line (61); a second member (73) which is coupled to the first member and forms a space (C) accommodating the resin supplied through the connection hole between the first member and it; and a third member (73) which is inserted between the first member and the second member and in which a plurality of outlets (735) are formed. An insertion part (717,727) is formed in the first member and/or second member to make at least a part of the third member to be inserted. |
