| 摘要 |
A container for receiving a large-sized pellicle for lithography is provided to perform easily a reinforcing process by simplifying a reinforcing structure thereof. A large-sized pellicle container includes a frame having four or more sides. Each side has a length of 300 mm or more. The large-sized pellicle container further is used for receiving a large-sized pellicle. The large-sized pellicle container is formed with a resin. A part of an exterior of the large-sized pellicle container is attached on a container reinforcing body after a loading process of the large-sized pellicle container. The large-sized pellicle container is formed with a cover for receiving the pellicle and a tray for supporting and transporting the cover. |
