发明名称 Apparatus having conveyor and method of transferring substrate using the same
摘要 An apparatus for a liquid crystal display device includes: a process chamber for treating a substrate; a load-lock chamber having an interior conveyor; and a transfer chamber connected to the process chamber and the at least one load-lock chamber, the transfer chamber having a substrate-transferring means.
申请公布号 US8545159(B2) 申请公布日期 2013.10.01
申请号 US20040956389 申请日期 2004.10.01
申请人 HWANG CHUL-JOO;KIM YONG-JIN;JUSUNG ENGINEERING CO., LTD. 发明人 HWANG CHUL-JOO;KIM YONG-JIN
分类号 B65G49/07;B65G49/06;H01L21/677 主分类号 B65G49/07
代理机构 代理人
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