发明名称 |
Apparatus having conveyor and method of transferring substrate using the same |
摘要 |
An apparatus for a liquid crystal display device includes: a process chamber for treating a substrate; a load-lock chamber having an interior conveyor; and a transfer chamber connected to the process chamber and the at least one load-lock chamber, the transfer chamber having a substrate-transferring means.
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申请公布号 |
US8545159(B2) |
申请公布日期 |
2013.10.01 |
申请号 |
US20040956389 |
申请日期 |
2004.10.01 |
申请人 |
HWANG CHUL-JOO;KIM YONG-JIN;JUSUNG ENGINEERING CO., LTD. |
发明人 |
HWANG CHUL-JOO;KIM YONG-JIN |
分类号 |
B65G49/07;B65G49/06;H01L21/677 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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