发明名称 |
Fabric containing non-crimped fibers and methods of manufacture |
摘要 |
A chemical-mechanical planarization pad for semiconductor manufacturing is provided. The pad comprises synthetic fibers that are non-crimped fibers which are present in an amount of 1.0% by weight to 98.0% by weight in the mat and wherein the non-crimped fibers have a length of 0.1 cm to 127 cm and a diameter of 1.0 to 1000 micrometers.
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申请公布号 |
US8546260(B2) |
申请公布日期 |
2013.10.01 |
申请号 |
US200913062312 |
申请日期 |
2009.09.03 |
申请人 |
HSU OSCAR K.;LEFEVRE PAUL;INNOPAD, INC. |
发明人 |
HSU OSCAR K.;LEFEVRE PAUL |
分类号 |
H01L21/302;H01L21/461 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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