| 摘要 |
PURPOSE: A vacuum isolation valve and a method for controlling a pipe using the same are provided to block a condition in which a chamber and a chamber cleaning gas feeding part mutually communicate, thereby easily keeping the chamber from being blocked from outside. CONSTITUTION: A vacuum isolation valve (100) includes a housing part (110), a pipe blocking part (120), a first blocking part (130), and a second blocking part (140). The housing part between a chamber and a chamber cleaning gas feeding part includes a pipe (111). The pipe blocking part at a certain position on the pipe selectively blocks the pipe. The first blocking part at the housing part moves in a first direction (a) in order to selectively block the opened first side of the pipe blocking part. The second blocking part at the housing part moves in a second direction (b), passes through the first side of the pipe blocking part, is inserted into the pipe blocking part, adheres to the second side of the pipe blocking part, and then blocks the pipe. |
