发明名称 P-type control gate in non-volatile storage and methods for forming same
摘要 Non-voltage storage and techniques for fabricating non-volatile storage are disclosed. In some embodiments, at least a portion of the control gates of non-volatile storage elements are formed from p-type polysilicon. In one embodiment, a lower portion of the control gate is p-type polysilicon. The upper portion of the control gate could be p-type polysilicon, n-type polysilicon, metal, metal nitride, etc. P-type polysilicon in the control gate may not deplete even at high Vpgm. Therefore, a number of problems that could occur if the control gate depleted are mitigated. For example, a memory cell having a control gate that is at least partially p-type polysilicon might be programmed with a lower Vpgm than a memory cell formed from n-type polysilicon.
申请公布号 US8546214(B2) 申请公布日期 2013.10.01
申请号 US20100887328 申请日期 2010.09.21
申请人 ORIMOTO TAKASHI WHITNEY;SUYAMA ATSUSHI;TIAN MING;CHIN HENRY;CHIEN HENRY;PURAYATH VINOD ROBERT;LEE DANA;SANDISK TECHNOLOGIES INC. 发明人 ORIMOTO TAKASHI WHITNEY;SUYAMA ATSUSHI;TIAN MING;CHIN HENRY;CHIEN HENRY;PURAYATH VINOD ROBERT;LEE DANA
分类号 H01L21/8242 主分类号 H01L21/8242
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