发明名称 Method for eliminating defects from semiconductor materials
摘要 Using a helium cryostat, the temperature for a substrate wafer(s) is reduced to 2.2 Kelvin over a period of twenty-four hours. Next, a soak segment will hold the temperature of the substrate wafer at 2.2 Kelvins for a period of ninety-six hours. At these low temperatures, alloys such as GaAs, InP, and GaP will form dipole molecular moments, which will re-align along lines of internal magnetic force as molecular bonds condense. Next the substrate wafer's temperature is ramped up to room temperature over a period of twenty-four hours. Next, the temperature of the substrate wafer is ramped up to assure that the temperature gradients made to occur within the wafer are kept low. Typically, a temper ramp up temperature will range between 300° F. to 1100° F. and depends upon the single crystal material used to construct the substrate wafer. Next, the substrate wafer undergoes a temper hold segment, which assures that the entire substrate wafer has had the benefit of the tempering temperature. A typical temper hold segment is around 3 hours and depends upon the material, thickness, and diameter size of the substrate wafer.
申请公布号 US8545621(B2) 申请公布日期 2013.10.01
申请号 US20090368517 申请日期 2009.02.10
申请人 HENRICHS JOSEPH REID;OPC LASER SYSTEMS LLC 发明人 HENRICHS JOSEPH REID
分类号 C30B33/00 主分类号 C30B33/00
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