Rotary encoder, rotary motor, rotary motor system, disk, and method of manufacturing rotary encoder

摘要

An encoder includes a disc-shaped disk disposed so as to be rotatable about a rotation axis and having at least one ring-shaped track in which a rotating grating is formed and at least one fixed grating which is fixedly disposed opposed to the disk so that the fixed grating and the rotating grating construct a diffraction interference optical system. Each of a plurality of slits included in the at least one rotating grating is formed along a curved line obtained by making each of a plurality of radial lines using the rotation axis as a center curved in the circumferential direction at a predetermined curve degree so that a pitch of the slits can be set to a predetermined value.