发明名称 Method for continuous formation of a purified sheet from a melt
摘要 An apparatus to pump a melt is disclosed. The pump has a chamber that defines a cavity configured to hold the melt. A gas source is in fluid communication with the chamber. A first valve is between the chamber and a first pipe and a second valve is between the chamber and a second pipe. The valves may be check valves in one embodiment.
申请公布号 US8545624(B2) 申请公布日期 2013.10.01
申请号 US20090487058 申请日期 2009.06.18
申请人 KELLERMAN PETER L.;SINCLAIR FRANK;CARLSON FREDERICK;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 KELLERMAN PETER L.;SINCLAIR FRANK;CARLSON FREDERICK
分类号 C30B13/28;B67D7/72 主分类号 C30B13/28
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