发明名称 |
Method for continuous formation of a purified sheet from a melt |
摘要 |
An apparatus to pump a melt is disclosed. The pump has a chamber that defines a cavity configured to hold the melt. A gas source is in fluid communication with the chamber. A first valve is between the chamber and a first pipe and a second valve is between the chamber and a second pipe. The valves may be check valves in one embodiment.
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申请公布号 |
US8545624(B2) |
申请公布日期 |
2013.10.01 |
申请号 |
US20090487058 |
申请日期 |
2009.06.18 |
申请人 |
KELLERMAN PETER L.;SINCLAIR FRANK;CARLSON FREDERICK;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
KELLERMAN PETER L.;SINCLAIR FRANK;CARLSON FREDERICK |
分类号 |
C30B13/28;B67D7/72 |
主分类号 |
C30B13/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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