| 摘要 |
PURPOSE: A vacuum isolation device is provided to uniformly extend a valve plate despite operating air from one side or both sides. CONSTITUTION: A supporting panel(1) has a supply line and cylinders. The cylinders are connected to the supply line. A piston(3) can slide in each cylinder. A valve plate(2) is connected to the piston. The valve plate contacts a portion around an inlet by operating the piston. An elastic member(4) elastically pressurizes the piston in a direction opposite to a direction in which the valve plate is mounted on the piston. |
