Liquid material vaporization apparatus

摘要

An object of this invention is to provide a liquid material vaporization apparatus that is capable of increasing the flow rate of a carrier gas without changing the shape of a nozzle. The liquid material vaporization apparatus comprises a gas-liquid mixing chamber in which a liquid material and the carrier gas are mixed, a liquid material introduction path that introduces the liquid material into the gas-liquid mixing chamber, a carrier gas introduction path that introduces the carrier gas into the gas-liquid mixing chamber, a vaporization nozzle section that is communicated with the gas-liquid mixing chamber to subject a mixture of the liquid material and the carrier gas to flash boiling, and a mixed gas derivation path that is communicated with the vaporization nozzle section to derive the mixed gas vaporized by the vaporization nozzle section.