发明名称 exposure apparatus and light source
摘要 PROBLEM TO BE SOLVED: To obtain an exposure device and a light source device performing exposure by effectively emitting light of a required wavelength range and required amount with low power consumption, and with a long service life. SOLUTION: A light source unit 41 includes a first LED array 411, a first lens array 412, a second LED array 413, a second lens array 414, a dichroic mirror 415, a third lens array 416, and a first imaging optical system 417. The first LED array 411 emits light of center wavelength 385 nm. The second LED array 413 emits light of center wavelength 365 nm. The dichroic mirror 415 superimposes an image of a light emission section 413c of the second LED array 413 on an image of a light emitting section 411c of the first LED array 411. COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 KR101313514(B1) 申请公布日期 2013.10.01
申请号 KR20110081843 申请日期 2011.08.17
申请人 发明人
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
代理机构 代理人
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