发明名称 MANUFACTURING METHOD FOR DEVICE WITH NANO STRUCTURE
摘要 PURPOSE: A method for manufacturing a device with a nanostructure is provided to improve electrical properties by forming a uniform nanostructure. CONSTITUTION: A second substrate is formed on a first substrate (s100). The first substrate is separated from the second substrate (s200). A nanostructure is formed on the surface of the second substrate (s300). The nanostructure is separated from the second substrate (s500). The separated nanostructure is formed on a third substrate (s600). [Reference numerals] (AA) Start; (BB) End; (s100) Second substrate is formed on a first substrate; (s200) First substrate is separated from the second substrate; (s300) Nanostructure is formed on the surface of the second substrate; (s400) Internal openings of the nanostructure are filled with a flattening material; (s500) Nanostructure is separated from the second substrate; (s600) Separated nanostructure is mounted on a third substrate
申请公布号 KR20130107174(A) 申请公布日期 2013.10.01
申请号 KR20120029070 申请日期 2012.03.21
申请人 POSCO 发明人 LEE, JONG LAM;KIM, KI SOO
分类号 H01L21/20 主分类号 H01L21/20
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