发明名称 |
MANUFACTURING METHOD FOR DEVICE WITH NANO STRUCTURE |
摘要 |
PURPOSE: A method for manufacturing a device with a nanostructure is provided to improve electrical properties by forming a uniform nanostructure. CONSTITUTION: A second substrate is formed on a first substrate (s100). The first substrate is separated from the second substrate (s200). A nanostructure is formed on the surface of the second substrate (s300). The nanostructure is separated from the second substrate (s500). The separated nanostructure is formed on a third substrate (s600). [Reference numerals] (AA) Start; (BB) End; (s100) Second substrate is formed on a first substrate; (s200) First substrate is separated from the second substrate; (s300) Nanostructure is formed on the surface of the second substrate; (s400) Internal openings of the nanostructure are filled with a flattening material; (s500) Nanostructure is separated from the second substrate; (s600) Separated nanostructure is mounted on a third substrate |
申请公布号 |
KR20130107174(A) |
申请公布日期 |
2013.10.01 |
申请号 |
KR20120029070 |
申请日期 |
2012.03.21 |
申请人 |
POSCO |
发明人 |
LEE, JONG LAM;KIM, KI SOO |
分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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