发明名称 Nonvolatile semiconductor memory device and method of manufacturing the same
摘要 According to one embodiment, a memory device includes a semiconductor substrate, first, second, third and fourth fin-type stacked layer structures, each having memory strings stacked in a first direction perpendicular to a surface of the semiconductor substrate, and each extending to a second direction parallel to the surface of the semiconductor substrate, a first part connected to first ends in the second direction of the first and second fin-type stacked layer structures each other, a second part connected to first ends in the second direction of the third and fourth fin-type stacked layer structures each other, a third part connected to second ends in the second direction of the first and third fin-type stacked layer structures each other, and a fourth part connected to second ends in the second direction of the second and fourth fin-type stacked layer structures each other.
申请公布号 US8546872(B2) 申请公布日期 2013.10.01
申请号 US201113072366 申请日期 2011.03.25
申请人 SAKUMA KIWAMU;KINOSHITA ATSUHIRO;KABUSHIKI KAISHA TOSHIBA 发明人 SAKUMA KIWAMU;KINOSHITA ATSUHIRO
分类号 H01L29/792 主分类号 H01L29/792
代理机构 代理人
主权项
地址