| 摘要 |
An optical detector for detecting foreign material and a process solution coating device having the same are provided to avoid detection error which is caused by temperature difference on an optical axis of a light beam, by installing an elongated optical axis cover member for surrounding upper and opposite lateral sides of the light beam. An optical detector for detecting foreign material comprises a light-permeable sensor unit, and a relative movement unit. The light-permeable sensor unit comprises a light projection unit(5) for projecting a light beam(4) along an upper surface of a substrate(1) to be processed loaded on a stage(2), and a light receiving unit(6) for receiving the light beam. The relative movement unit relatively moves the light-permeable sensor unit with respect to the substrate to be processed, so that the light beam can be scanned in parallel along the upper surface of the substrate to be processed, and comprising an elongated optical axis cover member(15) for surrounding upper and opposite lateral sides of the light beam from the light projection unit to the light receiving unit. |
