| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction table using a porous plate which enables the user to reliably confirm whether a suction force required for fixing a substrate is provided or not. SOLUTION: The suction table includes: a table 13 which is constituted of a stage 11 which is formed of the porous plate and on which a substrate G is placed and a base 12 for supporting the peripheral edge parts of the stage 11 and in which a hollow space 14 is formed; an evacuation mechanism 17 for reducing the pressure in the hollow space 14; and a pressure sensor 31 for detecting the pressure in the hollow space 14. A small hole 33 extending through the porous plate to the hollow space 14 is formed in the stage 11 at a position where the substrate G is placed. Consequently, a large pressure difference occurs when the substrate G is placed on the stage, and the pressure difference can be detected by the pressure sensor 31. COPYRIGHT: (C)2012,JPO&INPIT |
