发明名称 AIR FILTER FOR CVD DEVICE AND CVD DEVICE WITH THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an air filter for a CVD (Chemical Vapor Deposition) device, having characteristics suitable for use as the air filter for the CVD device such as well-balanced filter performance with low pressure loss and high particle capture rate, and excellent heat resistance and excellent plasma resistance.SOLUTION: An air filter for a CVD device includes a filter layer (a) including PTFE fiber (a), and an average fiber diameter of the PTFE fiber (a) is 10 nm to 50 μm.
申请公布号 JP2013193025(A) 申请公布日期 2013.09.30
申请号 JP20120062364 申请日期 2012.03.19
申请人 NIPPON VALQUA IND LTD 发明人 TSUJI KAZUAKI;SETOGUCHI YOSHIHIRO;MOTOI MANABU;SATO MASARU
分类号 B01D39/16;C23C16/44 主分类号 B01D39/16
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