摘要 |
PROBLEM TO BE SOLVED: To provide an air filter for a CVD (Chemical Vapor Deposition) device, having characteristics suitable for use as the air filter for the CVD device such as well-balanced filter performance with low pressure loss and high particle capture rate, and excellent heat resistance and excellent plasma resistance.SOLUTION: An air filter for a CVD device includes a filter layer (a) including PTFE fiber (a), and an average fiber diameter of the PTFE fiber (a) is 10 nm to 50 μm. |