发明名称 |
BATCH PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS CARBON FILM, AND COMPUTER-READABLE RECORDING MEDIUM FOR PERFORMING THE METHOD |
摘要 |
A batch processing method for forming a structure including an amorphous carbon film includes performing a preliminary treatment of removing water from a surface of the underlying layer by heating the inside of the reaction chamber at a preliminary treatment temperature of 800 to 950° C. and supplying a preliminary treatment gas selected from the group consisting of nitrogen gas and ammonia gas into the reaction chamber while exhausting gas from inside the reaction chamber; and, then performing main CVD of forming an amorphous carbon film on the underlying layer by heating the inside of the reaction chamber at a main process temperature and supplying a hydrocarbon gas into the reaction chamber while exhausting gas from inside the reaction chamber.
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申请公布号 |
KR20130106800(A) |
申请公布日期 |
2013.09.30 |
申请号 |
KR20130100355 |
申请日期 |
2013.08.23 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
OKADA MITSUHIRO;TOJO YUKIO |
分类号 |
H01L21/205;H01L21/312 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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