| 摘要 |
PURPOSE: A purging device of a front-opening unified pod (FOUP) for a wafer is provided to prevent the inner contamination of the FOUP by continuously or intermittently removing a processing gas which remains on the wafer. CONSTITUTION: A nitrogen storage container stores nitrogen. One end of a nitrogen supply pipe (12) is connected to the nitrogen storage container. A FOUP is connected to the other end of the nitrogen supply pipe. A nitrogen supply unit (10) supplies the nitrogen to the FOUP. An exhaust unit (20) exhausts the FOUP of the nitrogen. |
