| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor optical modulation element having low optical loss.SOLUTION: A semiconductor optical modulation device includes: an optical modulation waveguide which is formed of a semiconductor material and through which incident light propagates; a connection structure part formed of the semiconductor material, which is connected to each of side faces of the optical modulation waveguide on both side faces of the optical modulation waveguide; a lower oxide film layer formed below the optical modulation waveguide and the connection structure part; and a space part formed by removing a portion of the lower oxide film layer in contact with the connection structure part. |
