SHORT-WAVELENGTH COHERENT LIGHT SOURCE AND TRANSMISSION TYPE DIMMING MECHANISM

摘要

PROBLEM TO BE SOLVED: To highly efficiently extract only short-wavelength coherent light from a multiwavelength coherent beam including the short-wavelength coherent light such as high-order harmonic light whose wavelength is non-linearly converted and a condensed excitation laser beam, the short-wavelength coherent light being excited by the excitation laser beam, and transmitted coaxially with the excitation laser.SOLUTION: A shielding plate 15 having an opening 14 is provided on an optical axis of a multiwavelength coherent beam including an excitation laser beam Lp and short-wavelength coherent light (X ray Lx) as high-order harmonic that are exited from short-wavelength coherent light generating means (a gas cell 13). This configuration shields the excitation laser beam with a large divergence angle, included in the multiwavelength coherent beam and allows passage of the X ray Lx with a small divergence angle via the opening 14 so as to dim only excitation light components without dimming the short-wavelength coherent light (X ray Lx).