发明名称 DISPLACEMENT DEVICE, LITHOGRAPHIC APPARATUS AND POSITIONING METHOD
摘要 <p>A displacement device with a first and second part which are displaceable relative to one another, the first part being provided with a system of magnets, the second part being provided with a set of coil block units including: at least three first coil block units having current conductors oriented parallel to a second direction, at least two second coil block units having current conductors oriented parallel to a first direction, wherein the displacement device includes a controller configured to control the position of the second part relative to the first part, and wherein when the second part mainly moves in the second direction the controller is configured to levitate the second part from the first part in the third direction by using first coil block units only.</p>
申请公布号 KR101313118(B1) 申请公布日期 2013.09.30
申请号 KR20110054170 申请日期 2011.06.03
申请人 发明人
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
代理机构 代理人
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