发明名称 REFLOW INSPECTION APPARATUS AND CONTROL METHOD THEREOF
摘要 PURPOSE: A reflow inspecting system and a controlling method thereof are provided to improve visibility by removing smoke in an inspection process. CONSTITUTION: A stage includes a temperature sensor. An optical source (120) irradiates light to a reflow inspection object. An image pickup unit (140) inhales smoke from the reflow inspection object and transmits image information to the outside. A control unit (160) controls a reflow inspection process. [Reference numerals] (140-2) Image processing unit; (160) Control unit; (AA) Smoke
申请公布号 KR20130106608(A) 申请公布日期 2013.09.30
申请号 KR20120028274 申请日期 2012.03.20
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 KIM, YUN BOG;LEE, YOUNG JU;MYOUNG, SEON YOUNG;HAM, SUK JIN;PARK, SEONG CHAN;LEE, HYUN JUNG
分类号 H01L21/66;G01N21/956;G03F7/20 主分类号 H01L21/66
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