发明名称 POLARIZATION PROCESSING METHOD FOR OXIDE-BASED INORGANIC PIEZOELECTRIC MATERIAL SINTERED BODY FOR ULTRASONIC THICKNESS SENSOR, SINTERED BODY, AND POLARIZATION PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a polarization processing method for an oxide-based inorganic piezoelectric material sintered body for ultrasonic thickness sensor that obtains piezoelectric characteristics necessary for an ultrasonic thickness sensor without dipping in silicone oil as a sintered body polarization processing method when manufacturing an ultrasonic thickness sensor which is made of an oxide-based inorganic piezoelectric material and makes the density of the sintered body low so as to exhibit flexibility and that is suitable for a mass-production process, a sintered body polarized by the same, and a polarization processing device.SOLUTION: When a laminar sintered body which is made of an oxide-based inorganic piezoelectric material used as a piezoelectric body of an ultrasonic thickness sensor, and has a density of 70-80% is subjected to polarization processing, an electrode for corona discharge is arranged opposite a plate surface of a base electrode on a flat plate, a voltage is applied between the electrode for corona discharge and the base electrode with a laminar sintered body arranged on the base electrode to generate a corona discharge therebetween, and the laminar sintered body is exposed to within an electric field region formed by the corona discharge to performs the polarization processing on the lamina sintered body.
申请公布号 JP2013197299(A) 申请公布日期 2013.09.30
申请号 JP20120062600 申请日期 2012.03.19
申请人 MITSUBISHI HEAVY IND LTD 发明人 MORI KAZUTAKA;YAMAMOTO YUKO;UEMOTO AKIHIRO;KAWANAMI SEIICHI
分类号 H01L41/257;H01L41/08;H01L41/09;H01L41/187;H01L41/39 主分类号 H01L41/257
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