| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a polyimide laminate having a polyimide resin film which is uniform in film thickness and superior in surface flatness.SOLUTION: A method of manufacturing a polyimide laminate which has a polyimide resin film formed on a substrate includes a process (a) to a process (d). (In the process (a)), the substrate or a polyimide precursor resin film already formed on the substrate is coated with a polyimide precursor resin film forming liquid in which the content of a solvent A is 46-95 wt.% to the whole solution, and the coating film is dried until the remaining amount of the solvent A becomes 1-45 wt.% of the whole coating film so as to form the polyimide precursor resin film on the substrate. (In the process (b)), the polyimide precursor resin film obtained in the process (a) is heated to 150-250°C. (In the process (c)), the surface of the polyimide precursor resin film is flattened after the process (b). (In the process (d)), the polyimide precursor resin film is heated to 300-450°C and the polyimide precursor resin is ring-closed to form the polyimide resin film, after the process (c). |
