| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface light emitting laser element that attains high-speed modulation and transmission characteristics.SOLUTION: A surface light emitting laser element includes a lower multilayer film reflector and an upper multilayer film reflector which comprise a periodic structure of a high refractive index layer and a low refractive index layer, and form an optical resonator; an active layer which is formed between the lower multilayer film reflector and upper multilayer film reflector; a current constriction layer which is formed between the upper multilayer film reflector and active layer and has a current injection portion and a current constriction portion formed at an outer periphery of the current injection portion through a selective oxidation heat treatment; and a refractive index difference adjusting layer which is formed right below the upper multilayer film reflector, and has a recessed portion on a surface. The recessed portion is formed having an inner diameter substantially equal to the outer diameter of the current injection portion and also substantially overlapping the current injection layer when viewed from a stacking direction of the current constriction layer and refractive index difference adjusting layer, and the formation of the recessed portion makes small the refractive index difference obtained by subtracting an effective refractive index of a region, corresponding to the current construction portion, in the optical resonator from an effective refractive index of a region corresponding to the current injection portion. |
