| 摘要 |
PURPOSE: An ultra high-purity sublimation purification apparatus and a method thereof are provided to enable high-purity purification by one sublimation purification, and to obtain purified products with ultra high purity in more than one sublimation purification. CONSTITUTION: An ultra high-purity sublimation purification apparatus includes a pipe, more than one heater (11,12,13,14,15,16,17,18,19) installed on one side of the pipe, a vacuum pump (90) connected to the inside of the pipe from the other side of the pipe, and at least two scattering speed controllers. The scattering speed controllers are installed from the heater side toward the opposite side. The scattering speed controllers include a blocking film with more than one passage, and a shielding plate with wings capable of periodically opening and closing the passage. |
