| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing apparatus that prevents an optical system from being damaged.SOLUTION: A laser processing apparatus includes a workpiece holding unit for holding a workpiece and a laser beam applying unit for applying a laser beam to the workpiece held by the workpiece holding unit. The laser beam applying unit includes a laser beam oscillator for oscillating a laser beam, a focusing unit for focusing the laser beam oscillated by the laser oscillator onto the workpiece held by the workpiece holding unit, and an optical system provided between the laser beam oscillator and the focusing unit for transmitting the laser beam oscillated by the laser oscillator. A wavelength converting mechanism is provided between the optical system and the focusing unit to convert the wavelength of the laser beam oscillated by the laser oscillator into a short wavelength. |
