摘要 |
PROBLEM TO BE SOLVED: To allow easy measurement of the resolving power of an image sensor for exposure position adjustment of an exposure device.SOLUTION: Light is transmitted through a mask for calibration including a mask part including an image capture window for image capture, a glass surface part provided below the mask part and constituted of a glass material bonded to the vicinity of the image capture window with an adhesive, a shielding line group of shielding lines provided on the image capture window and the glass surface part and constituted of a shielding material. Light transmitted through parts other than the shielding line group is received, and the received light is converted to image information from the top of the received light, and resolving power information is measured on the basis of the image information. |