| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for determining a defect classification item and its extraction order that reduces misrecognition of a defect of FSA and its extraction order.SOLUTION: In a rule [1], sub rules [1-1] to [1-3] described below are satisfied. Here, a difference in the number of a predetermined number of bits is determined as an error and it is considered that "the size is equal." In the sub rule [1-1], a maximum defect size of a precedent defect classification item is larger than a maximum defect bit size of a following defect classification item. In the sub rule [1-2], a minimum defect size of the precedent defect classification item is larger than a minimum defect bit size of the following defect classification item. In the sub rule [1-3], a minimum defect size of an arbitrary defect classification item is smaller than a maximum defect bit size of the defect classification item right after it. In a rule [2], when there are a plurality of items which are equal in maximum defect bit size and minimum defect bit size under the conditions of the rule [1], special items and items with severe restrictions are extracted preferentially in extraction order. |
