| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device which realizes multi-functionalization and efficient processing by removing restrictions on a processing unit in a sample chamber.SOLUTION: A charged particle beam device includes: a sample chamber which can be evacuated; a sample stage 30 for holding a sample 20 in the sample chamber; an electron beam irradiation system which irradiates the sample 20 with an electron beam; a focused ion beam irradiation system which irradiates the sample 20 with a focused ion beam; a secondary signal detector which detects a secondary signal from the sample generated by the irradiation with at least one of the electron beam and focused ion beam; a sample stage driving unit 40 which has a rotation axis 40A orthogonal to one of an irradiation axis of the electron beam irradiation system and an irradiation axis of the focused ion beam irradiation system; and a sample transfer mechanism 80 which transfers the sample 20 onto the sample stage 30. The sample transfer mechanism 80 includes a transfer path 82 provided to the sample stage driving unit 40 in a direction parallel to the rotation axis 40A of the sample stage driving unit 40. |
