摘要 |
PROBLEM TO BE SOLVED: To make it possible to check, midway through conversion into DMD data, whether the conversion of a drawing pattern is done correctly.SOLUTION: Drawing data is modulated using a DMD, in which a plurality of mirrors are arranged in two directions, and the modulated drawing data is supplied to a light beam irradiation device. When doing so, parity graphics for checking whether the drawing data is drawn correctly is arranged outside a drawing area in advance. In a stage of generating the drawing data, it is sensed in real time whether the parity graphics is detected at a predetermined position to thereby make a discrimination between normal drawing and abnormal drawing. |