| 摘要 |
PROBLEM TO BE SOLVED: To suppress the occurrence of reductions in characteristics and easily perform characteristic inspection in a short time.SOLUTION: A method for manufacturing a photoelectric conversion element comprises: a step for forming a photoelectric conversion layer on a substrate 1 by stacking a plurality of compound semiconductors having different compositions from each other; a step for forming a rear surface electrode 20 on a lower surface of the substrate 1 where the photoelectric conversion layer is formed; and a step for adhering a sheet 30 having a plurality of openings 39 and adhesiveness to the lower surface of the substrate 1 where the rear electrode 20 is formed. The method further comprises: a step for dicing the substrate 1 in which the sheet 30 is adhered thereto to divide it into a plurality of photoelectric conversion elements; a step for measuring characteristics of a plurality of photoelectric conversion elements by passing measuring probes 41, 42 over each of a plurality of divided photoelectric conversion elements and through the opening 39 of the sheet and contacting probes with them from a lower side; and a step for peeling a plurality of photoelectric conversion elements from the sheet 30 after the measuring step. |
