| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a template, capable of easily forming patterns having different depth.SOLUTION: A method for producing a template according to an embodiment includes the steps of: performing etching by injecting charged beams into a part of a first principal surface of a base material having the first principal surface to form a second principal surface retracting from the first principal surface; forming a mask pattern on the first principal surface and the second principal surface; and performing etching of the base material through the mask pattern to form a first pattern on the first principal surface and a second pattern on the second principal surface. |
