| 摘要 |
PROBLEM TO BE SOLVED: To provide a pretreatment method of an insulating sample and a surface analysis method which can make a measurement area uniformly charged.SOLUTION: A conductive thin film 4 is formed on the periphery of an X-ray irradiation area of an insulating sample 1. Therefore, when an X-Ray photoelectron spectroscopy analysis of the insulating sample is performed by using a monochromated X-ray source probe and a neutralizing electron gun, excess electrons in a measurement area are efficiently released so that the measurement area can be uniformly charged. |
