| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor light-emitting element wafer in which total number lighting inspection can be carried out in the early stage of the manufacturing process of a semiconductor light-emitting element at a low cost, and to provide a semiconductor light-emitting element wafer, and a susceptor.SOLUTION: In the manufacturing method of a semiconductor light-emitting element wafer including a semiconductor growth step for forming a semiconductor structure layer by laminating a first semiconductor layer having a first conductivity type, an active layer, and a second semiconductor layer having a second conductivity type, sequentially on a substrate, the semiconductor growth step includes an electrode formation step for generating an abnormal growth portion where at least a part of the first semiconductor layer is exposed by performing abnormal growth at a temperature lower than the growth temperature of the semiconductor structure layer in a partial region on the substrate, forming a first electrode on the second semiconductor layer of a normal growth portion other than the abnormal growth portion after ending the semiconductor growth step, and forming a second electrode connected with the first semiconductor layer exposed from the abnormal growth portion. |
