| 摘要 |
<p>A method for depositing a film is provided, which enables to deposit an oil repellent film having an enhanced abrasion resistance properties not to mention being good enough for practical use. A film deposition system 1, wherein a substrate holder 12 having a substrate holding surface for holding a plurality of substrates 14 is provided rotatably to inside a vacuum container 10, is configured to comprise an ion source 38 provided to inside the vacuum container 10 to have a configuration and in an arrangement and/or a direction, by which an ion beam can be irradiated only to a partial region of the substrate holding surface, and a deposition source 34 provided to inside the vacuum container 10 in an arrangement and a direction, so that a film deposition material of an oil repellent film can be supplied to the whole region of the substrate holding surface; wherein an operation of the ion source 38 is stopped before starting an operation of the deposition source 34.</p> |
