发明名称 ADHESIVE FILM AND TAPE FOR SEMICONDUCTOR WAFER PROCESSING
摘要 <p>Provided are an adhesive film and a tape for semiconductor wafer processing, which are reduced in softening of a bonding agent layer due to the absorption of moisture in the air and are thus capable of suppressing the occurrence of pick up failure. This adhesive film is composed of a base film and an adhesive layer that is provided on the base film, and has a water vapor permeability of 10.0 g/m2/day or less. This tape for semiconductor wafer processing comprises an adhesive film, which is composed of a base film and an adhesive layer that is provided on the base film, and a bonding agent layer that is formed on the adhesive layer, and the adhesive film has a water vapor permeability of 10.0 g/m2/day or less.</p>
申请公布号 KR20130106404(A) 申请公布日期 2013.09.27
申请号 KR20137012090 申请日期 2010.11.11
申请人 FURUKAWA ELECTRIC CO., LTD. 发明人 AOYAMA MASAMI;ISHIWATA SHINICHI;MORISHIMA YASUMASA
分类号 C09J7/02;H01L21/301 主分类号 C09J7/02
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