| 摘要 |
PURPOSE: A groove processing device for a substrate is provided to control the movement of a groove processing tool and a vibration member by using a guide member formed in the upper part of the vibration member and to process a deep groove. CONSTITUTION: A groove processing tool is mounted to a head(3). The head comprises a holder(17), a vibration member(18), and a vibration control tool. The holder comprises a holder body(22) and a support member(23). The vibration member is movably supported by the holder and moves in a right direction or a left direction. The extension part(25) of the vibration member is guided by the sidewall of the guide groove. The vibration control tool restricts movement in the vibration axis direction of the vibration member. |
