发明名称 CAPTEUR INERTIEL ET PROCEDE DE FABRICATION CORRESPONDANT
摘要 <p>An inertial sensor including at least one measurement beam and one active body formed of a proof body and of deformable plates, said active body being maintained in suspension inside of a tight enclosure via its plates, the measurement beam connecting a portion of the proof body to an internal wall of said enclosure, said measurement beam having a lower thickness than the proof body.</p>
申请公布号 FR2972263(B1) 申请公布日期 2013.09.27
申请号 FR20110051746 申请日期 2011.03.03
申请人 TRONIC'S MICROSYSTEMS 发明人 RENARD STEPHANE;FILIPE ANTOINE;COLLET JOEL
分类号 G01P15/02;B81B3/00 主分类号 G01P15/02
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