TRICHLOROSILANE CONVERSION REACTOR WITH DIVIDED HEAT SHIELD

摘要

PURPOSE: A trichlorosilane production apparatus is provided to increase the contact time of tetrachlorosilane with a graphite rod which is a heating source, and to reduce the loss of reaction heat. CONSTITUTION: A trichlorosilane production apparatus includes plural separated insulation cylinders and a bridge (320). The separated insulation cylinders surround a graphite rod installed inside a trichlorosilane conversion reactor. The bridge connects the separated insulation cylinders.