OPTICAL POSITION DETECTION APPARATUS BASED ON CMM

摘要

PURPOSE: An optical position measuring device for a coordinate measuring machine (CMM) probe is provided to measure the position of the deformation of a stylus ball by marking a fluorescent point on the stylus ball, thereby increasing the accuracy and the availability of measurement. CONSTITUTION: An optical position measuring device for a CMM probe includes a probe (20), an excitation unit (30), a lens (44), and a controller (50). The probe includes a fluorescent point on a tip of a front end portion. The excitation unit excites the fluorescent point of the probe. The lens collects excited lights. The controller generated position information by inputting the collected lights to a detector (55).